Recently, our laboratory added the multipurpose deposition system shown here, combining
five magnetrons (both DC and RF, plus ion assistant deposition), electron guns, thermal
evaporators, and an effusion cell. Coupled with our e-beam lithography system (shown
next), we've created a powerful tandem for contributing to, and advancing, quantum
device research.
One of the latest developments from Hitachi, which successfully combines SEM, EDX,
WDX, EBSD (coming this year), and E-Beam Lithography.
Our versatile microscope performs numerous functions, including capabilities of E-beam
lithography equipped by Nabity, which enables patterning with 50 nm resolution. E-beam
patterning presents exciting possibilities for contemporary electronic devices; furthermore,
when exploring novel quantum devices, it is a crucial component of research at APL.
Clean Bench, for working with chemicals.
Thin films being prepared for required lithographic processes. In addition to hardware
described already, some other standard tools are required, including chemical processing
of E-beam resists, which are being performed under a ventilated hood for fume extraction.
Our modest Machine Shop, and related technical facilities.
Most small-scale and simple projects we perform in-house. For this reason, we keep
technical tools handy to avoid delays and maintain our progress. But for complex,
technical tasks, we typically place outsourced machine shop orders.
To connect nano-devices with our macro-world, traditional wirebonding should be in
order.
While APL devices may look expensive, not all of our instruments have been purchased
brand new. The faithfully reliable wirebonder shown above was restored to working
order by our own effort. So, rather than spending an immoderate $20,000 on new equipment,
we conserve our budget considerably with a little patience and technical ingenuity.
Dozens of similar examples in our lab help demonstrate APL's conscious efforts to
recycle and re-use machinery and equipment, not just to control costs, but also to
minimize impact on the environment.
Another indispensable instrument: Cambridge Stereoscan-150 SEM.
Donated by Mr. Larry Glassman, a pioneer of digital signal acquisition in electron
microscopy. We restored it to working condition ourselves, after its long journey
from Atlanta, Georgia.
Collaborating with our outstanding colleagues, combined with a steady accumulation
of cutting-edge technologies in our first-rate facility, creates for us a powerful
tandem of potential for contributing to, and advancing, quantum device research.